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发明名称
MANUFACTURE OF SUBSTRATE FOR FORMING SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPS6338255(A)
申请公布日期
1988.02.18
申请号
JP19860182260
申请日期
1986.08.01
申请人
FUJITSU LTD
发明人
ARIMOTO YOSHIHIRO
分类号
H01L27/00;H01L21/02;H01L21/31;H01L21/76;H01L21/762;H01L21/84;H01L27/12
主分类号
H01L27/00
代理机构
代理人
主权项
地址
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