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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6337639(A)
申请公布日期
1988.02.18
申请号
JP19860180093
申请日期
1986.08.01
申请人
OKI ELECTRIC IND CO LTD
发明人
KIMURA KENICHI;ITO MASAAKI;NONAKA TOSHIO;TAKAHASHI SEIICHI
分类号
H01L23/522;H01L21/768
主分类号
H01L23/522
代理机构
代理人
主权项
地址
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