| 摘要 |
PURPOSE:To start a discharge stably by a method wherein a discharge voltage is stepped up by a transformer and applied to auxiliary electrodes provided on both the sides of main electrodes and an oscillator is started by a semiconductor switch provided on the primary side of the transformer. CONSTITUTION:Auxiliary electrodes 8a/9a and 8b/9b are provided on both the sides of main electrodes 6 and 7 respectively. A semiconductor switch 22 which switches with a required pulse width is provided on the primary side of a step-up transformer 16 which applies discharge voltages to the auxiliary electrodes 8a/9a and 8b/9b and waveform compensating capacitors 18a and 18b are provided on the secondary side of the transformer 16. As the auxiliary electrodes 8a/9b and 8b/9b are provided on both the sides of the main electrodes 6 and 7, a stable discharge between the main electrodes 6 and 7 can be obtained. Moreover, the distortion of the pulse waveform created during the operation of the step-up transformer 16 or of the semiconductor switch 22 is reformed by the waveform compensating capacitors 18a and 18b provided on the secondary side of the step-up transformer 16 for applying the discharge voltages to the auxiliary electrodes 8a/9a and 8b/9b so that a pulse voltage with a sharp waveform can be outputted. |
