| 摘要 |
PURPOSE:To obtain a stable discharge by a method wherein respective DC sources which apply voltage to main electrodes and auxiliary electrodes are provided separately and the voltage of the source with a lower voltage among those DC sources is applied to a high speed switch and the voltages applied to both the electrodes are kept below discharge starting voltages when the high speed switch is not continuous. CONSTITUTION:DC sources 1a and 1b which apply voltage to main electrodes 6 and 7 and auxiliary electrodes 8 and 9 respectively are separately provided. A pulse voltage is generated by a high speed switch 5 to which the same DC voltage as applied to the auxiliary electrodes 8 and 9 is applied to induce discharges between the auxiliary electrodes 8 and 9 and between the main electrodes 6 and 7. Therefore, when the high speed switch 5 is in switching state, a preliminary discharge between the auxiliary electrodes 8 and 9 is started with a required pulse width and, at the same time with this discharge, the voltage applied to the auxiliary electrodes 8 and 9 is added to the voltage applied to the main electrodes 6 and 7 to induce a discharge between the main electrodes 6 and 7 and pulse laser excitation is started. |
