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经营范围
发明名称
CHARGED PARTICLE BEAM DEVICE
摘要
申请公布号
JPS6337549(A)
申请公布日期
1988.02.18
申请号
JP19860181378
申请日期
1986.08.01
申请人
JEOL LTD
发明人
NORIOKA SETSUO
分类号
H01J37/147;H01J37/22;H01L21/66
主分类号
H01J37/147
代理机构
代理人
主权项
地址
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