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发明名称
PLASMA GENERATOR
摘要
申请公布号
JPS6337541(A)
申请公布日期
1988.02.18
申请号
JP19860179360
申请日期
1986.07.30
申请人
FUJITSU LTD;ERIONIKUSU:KK
发明人
MORI HARUHISA;IGARASHI TAKASHI;HOTTA MASANAO
分类号
H01J27/08;H01J37/08
主分类号
H01J27/08
代理机构
代理人
主权项
地址
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