| 摘要 |
PURPOSE:To obtain a semiconductor surface light emitting element which reduces a light irradiating angle, enhances the coupling efficiency to an optical fiber, and provide easy manufacture by providing a Fresnel strip plate formed concentrically circular shape. CONSTITUTION:After an insulating SiO2 film 6 is deposited, for example, by a CVD method on a clad layer 5, a window 6a having 10mum of radius is formed. After an insulating SiO2 film 7 is deposited on an N-type InP substrate 2, a window 7a having 120 microns of radius is formed, and Au-Ge-Ni electrode 8 is deposited. A window 8a is formed at the electrode 8. After an Au-Zn electrode 9a is deposited on the upside of the layer 5, it is alloyed. Aluminum is deposited on the electrode 8 to form an aluminum electrode 9b, Au is deposited on the electrode 9a as an ohmic electrode, and a Fresnel strip plate 12 is formed by etching a concentric aluminum film 12a with H3PO4 on the part 10 of the window 8a of the electrode 8. |
