| 摘要 |
PURPOSE:To be able to shorten the decomposing time of a thin film formed on the surface of a wafer and to accurately measure the concentration of an impurity in the film by holding part of the edge of the wafer and securing the wafer on the upper surface of a wafer carrier. CONSTITUTION:A wafer carrier has a holder part 1 for holding a wafer by pinching the part of the edge of the wafer, and a body part 4 having a structure for securing a plurality of the part 1 which hold the wafers to the upper surface for holding the wafers in a suspension manner. For example, the part 1 is inserted from below to a stationary unit 5 formed by opening, for example, a hole on the upper surface, a stationary rod 7 is inserted into a hole 6 opened at the top of the part 1 to be fixed. The material of the member which forms the carrier may be any which can tightly hold and secure the wafer without being corroded by a decomposing agent or free from dissolved matter which affects the concentration measurement of an impurity element, and Teflon is most preferable for its purpose. |
