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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6336566(A)
申请公布日期
1988.02.17
申请号
JP19860178890
申请日期
1986.07.31
申请人
HITACHI LTD
发明人
HONMA HIDEO;MISAWA YUTAKA;MONMA NAOHIRO
分类号
H01L29/73;H01L21/20;H01L21/331;H01L21/74;H01L21/762;H01L29/732
主分类号
H01L29/73
代理机构
代理人
主权项
地址
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