| 摘要 |
PURPOSE:To eliminate defective evaluation on a multilayer semiconductor layer by using a spectroscope and a plurality of photoelectric transducers with mutually different central wavelengths, irradiating and scanning electron rays and selecting photoelectric transducers with the central wavelengths of spectral output. CONSTITUTION:The spectroscope A and a plurality of photoelectric transducers D1, D2...DN with photoelectric converting wavelength zones W1, W2...WN, to which spectral output H is supplied and which have mutually different central wavelengths lambda'1, lambda'2...lambda'N, are used, electron rays are irradiated and scanned to the multilayer semiconductor S in which the P semiconductor layers N1, N2...NP are laterally laminated in reverse order, and beams LO obtained through the recombination of electron-hole pairs generated are inputted to the spectroscope A through a collimator C. On the other hand, the photoelectric transducers with photoelectric converting wavelength bandwidth containing the central wavelengths of spectral output H are selected by a select circuit G, output acquired from the photoelectric transducer is supplied to a picture annunciator M and a recorder R, and the multilayered semiconductor S is evaluated. |
