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发明名称
APPARATUS FOR COATING PHOTORESIST
摘要
申请公布号
JPS6336869(A)
申请公布日期
1988.02.17
申请号
JP19860179688
申请日期
1986.07.29
申请人
NEC KYUSHU LTD
发明人
TAGAMI KAZUNORI
分类号
B05C5/00;B05C11/08;H01L21/027
主分类号
B05C5/00
代理机构
代理人
主权项
地址
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