| 摘要 |
In the method, the radio frequency (RF) antenna is made by providing a clean coil made of copper tubing or other metal conductor, which is coated with a tacky organic binder, and then with a powdered glass frit, as by sprinkling the frit uniformly over the binder. The coil is then heated internally in an inert gas atmosphere, preferably by passing an electrical heating current along the coil. Initially, the coil is internally heated to about 200 DEG C. to boil off the water from the binder, and then to about 750 DEG C.-850 DEG C. to melt the glass frit, while also burning off the organic binder. The melted frit forms a molten glass coating on the metal coil, which is then cooled to solidify the glass, so that the metal coil is covered with a thin continuous homogeneous impervious glass coating of substantially uniform thickness. The glass coating affords complete electrical insulation and complete dielectric protection for the metal coil of the RF antenna, to withstand voltage breakdown and to prevent sputtering, while also doubling the plasma generating efficiency of the RF antenna, when energized with RF power in the vacuum chamber of an ion source for a particle accelerator or the like. The glass frit preferably contains apprxoimately 45% lead oxide.
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