| 摘要 |
PURPOSE:To easily inspect a leak by connecting an exhaust pump, a sealing gas detector, a sealing gas supplier, and a substitute gas supplier to an airtight inspection container consecutively through valves. CONSTITUTION:The gas sealing equipment 1 is installed in the airtight inspection container 2, which is sealed hermetically and evacuated by the exhaust pump 5 to introduce the residual gas in the container 2 into sealing gas detectors 7 and 9, thereby checking whether there is the sealing gas or not. When the sealing gas of a sample does not leaks, a valve 12 is open and other valves are closed to introduce helium into the container 2 from the sealing gas supplier 13 and place the inside of the container 2 in a pressure-applied state; and then the valves 14 and 10 are open and other valves are closed to introduce dry air into the container 2 from the substitute gas supplier 15, and the valves 4 and 6 are opened and other valves are closed to perform evacuation by the pump 5 and introduce the residual gas into a mass spectrograph 7 and also measure the helium concentration, thereby checking whether there is sealing gas or not. |
