发明名称 |
Single wafer centrifugal dryer |
摘要 |
The device according to this invention comprises a casing in which turns a device designed to support and hold the wafer, the said device is fitted eccentrically with respect to its rotational pin (3) a support element 5-6 designed to hold the silicon wafer by its edges in a horizontal plane, the device assembly being mounted in stable balance with respect to the said pin.
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申请公布号 |
US4724619(A) |
申请公布日期 |
1988.02.16 |
申请号 |
US19860940536 |
申请日期 |
1986.12.10 |
申请人 |
RECIF SA |
发明人 |
POLI, BERNARD;CHINCHOLLE, GERARD |
分类号 |
F26B5/08;H01L21/00;H01L21/304;(IPC1-7):F26B11/22 |
主分类号 |
F26B5/08 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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