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发明名称
METHOD FOR REVERSING PATTERN
摘要
申请公布号
JPS6332935(A)
申请公布日期
1988.02.12
申请号
JP19860176216
申请日期
1986.07.26
申请人
HOYA CORP
发明人
YOKOGAWA NAOHIRO
分类号
H01L21/30;H01L21/027;H01L21/306
主分类号
H01L21/30
代理机构
代理人
主权项
地址
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