| 摘要 |
PURPOSE:To accelerate a stage speed by containing a magnetic force generator in a stage, and varying or inverting in polarity a magnetic force between the stages in response to a variation in the stage speed. CONSTITUTION:When a stage moving unit 3 and physical bodies 8, 9 for generating magnetic forces at bases 1 are contained in a wafer stage and the forces are varied in response to the stage feeding speed, a stage weight is apparently varied. Accordingly, a floating force is applied at the time of high speed moving to reduce a sliding resistance, and an attracting force is applied at the time of extremely low or low speed to accelerate or enhance the accuracy of the stage. |
