| 发明名称 |
METHOD AND APPARATUS FOR INSPECTING A PATTERN |
| 摘要 |
In a method for inspecting a pattern produced by using pattern data of a predetermined reference pattern, comparison is carried out between the pattern reproduced from the scanning signal of the pattern and the pattern produced from the signal of a modified form of the predetermined reference pattern. |
| 申请公布号 |
DE3277942(D1) |
申请公布日期 |
1988.02.11 |
| 申请号 |
DE19823277942 |
申请日期 |
1982.08.19 |
| 申请人 |
FUJITSU LIMITED |
发明人 |
MATSUI, SHOUGO;MASHIMA, YOSHIMITU;KOBAYASHI, KENICHI |
| 分类号 |
G01N21/88;G01N21/956;G03F1/84;G03F7/20;G06T7/00 |
主分类号 |
G01N21/88 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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