发明名称 FREE-STANDING SUBSTRATE, FUNCTION ELEMENT AND METHOD FOR PRODUCING SAME
摘要 This free-standing substrate is provided with: a first nitride layer which is grown by a hydride vapor deposition method or an ammonothermal method and is composed of a nitride of one or more elements selected from the group consisting of gallium, aluminum and indium; and a second nitride layer which is grown on the first nitride layer by a sodium flux method and is composed of a nitride of one or more elements selected from the group consisting of gallium, aluminum and indium. In the first nitride layer, a plurality of single crystal grains are arranged so as to extend between a pair of main surfaces of the first nitride layer. In the second nitride layer, a plurality of single crystal grains are arranged so as to extend between a pair of main surfaces of the second nitride layer. The thickness of the first nitride layer is larger than the thickness of the second nitride layer.
申请公布号 WO2016121853(A1) 申请公布日期 2016.08.04
申请号 WO2016JP52435 申请日期 2016.01.28
申请人 NGK INSULATORS, LTD. 发明人 YOSHINO TAKASHI;IMAI KATSUHIRO;SAKAI MASAHIRO
分类号 C30B29/38 主分类号 C30B29/38
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