发明名称 SEMICONDUCTOR DEVICE HAVING WORK-FUNCTION METAL AND METHOD OF FORMING THE SAME
摘要 The present invention relates to a semiconductor device having work-function metal. First to third active regions are formed on a substrate. A first gate electrode, a second gate electrode, and a third gate electrode are formed on the first active region, the second active region, and the third active region, respectively. The first gate electrode has a first P-work-function metal layer, a first capping layer, a first N-work-function metal layer, and a first barrier metal layer, and a first conductive layer. The second gate electrode has a second capping layer, a second N-work-function metal layer, a second barrier metal layer, and a second conductive layer. The third gate electrode has a second P-work-function metal layer, a third capping layer, a third N-work-function metal layer, and a third barrier metal layer. The third gate electrode does not have the first and second conductive layers.
申请公布号 KR20160093424(A) 申请公布日期 2016.08.08
申请号 KR20150014418 申请日期 2015.01.29
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 KIM, JU YOUN
分类号 H01L27/092;H01L21/8238 主分类号 H01L27/092
代理机构 代理人
主权项
地址