| 摘要 |
PROBLEM TO BE SOLVED: To suppress reduction in drying efficiency in condensation drying and to reduce failure in application membrane.SOLUTION: There is provided a drying apparatus 1, which comprises a condensation plate 11 facing to application membrane on a substrate f1 and which condenses steam of solvent from the application membrane with the condensation plate 11 to dry the steam. The application membrane contains silicon compound that generates silane gas. The drying apparatus 1 further comprises a planar recovery member 13 arranged in a facing manner to the application membrane on the substrate f1, as recovery means for recovering silane gas generated from the application membrane before drying with the condensation plate 11.SELECTED DRAWING: Figure 1 |
