发明名称 THIN BASE PLATE CONVEYING DEVICE
摘要 <p>PURPOSE:To make it possible to remove the influence of a position discrepancy when a thin base plate is delivered at the first position, by furnishing a positioning device to position the thin base plate during the carrying from the first position to the second position, at a transfer member. CONSTITUTION:When the positioning is not completed while a slider branch base 2 is transferring, the vacuum absorption is released, a signal is delivered to the driving unit 9a of a positioning variable roller 8a, a quadrilateral base plat 10 is squeezed to positioning rollers 7a and 7b, a signal is delivered to the driving unit 9b of a positioning variable roller 8b, and the base plate 10 is further squeezed to a roller 7c in the condition to squeeze the base plate 10 to the rollers 7a and 7b. After that, the base plate 10 is absorbed to the slider 5 by an absorption device, a control signal is delivered to the units 9a and 9b, and the rollers 8a and 8b are removed from the base plate 10 returing to the initial positions. Then, after the branch base 2 reaches to a specific position, a motor is stopped, a slider motor is operated inversely to move the slider 5 to the right, and, when the slider 5 contacts to a block 4b, the motor is stopped and the vacuum is released.</p>
申请公布号 JPS6331958(A) 申请公布日期 1988.02.10
申请号 JP19860172527 申请日期 1986.07.22
申请人 NIKON CORP 发明人 AOYAMA MASAAKI
分类号 B23Q7/08;B65H9/10;H01L21/677;H01L21/68 主分类号 B23Q7/08
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