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发明名称
VERFAHREN ZUR HERSTELLUNG EINER MONOKRISTALLINEN SILIZIDSCHICHT AUF EINEM SILIZIUMSUBSTRAT
摘要
申请公布号
DD254086(A1)
申请公布日期
1988.02.10
申请号
DD19860296638
申请日期
1986.11.26
申请人
FRIEDRICH-SCHILLER-UNIVERSITAET JENA DIREKTORAT FUER FORSCHUNG,BFSN,DD
发明人
GAERTNER,KONRAD,DD;KASCHNER,CORNELIA,DD;WITZMANN,ANDRE,DD
分类号
H01L21/428;(IPC1-7):H01L21/428
主分类号
H01L21/428
代理机构
代理人
主权项
地址
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