Hybrid diffractive optical element and spectral beam combination grating

摘要

An integrated optical device that combines a diffractive optical element (DOE) to provide beam combining for coherent beams and a spectral beam combination (SBC) grating for combining beams of differing wavelengths. The device includes a substrate where a periodic pattern for the DOE is formed in the top surface of the substrate in a first direction. A plurality of reflective layers are deposited on the substrate over the periodic pattern so that the layers follow the shape of the pattern. A top dielectric layer is deposited on the plurality of reflective layers so that the top dielectric layer also follows the shape of the periodic pattern. A periodic grating for the SBC is formed into the top dielectric layer in a second direction substantially orthogonal to the first direction.

主权项

1. An optical device comprising:
a substrate having a top surface; a periodic pattern formed in the top surface of the substrate in a first direction; a plurality of dielectric layers deposited on the top surface of the substrate and having a shape that conforms to the periodic pattern; a top dielectric layer deposited on the plurality of dielectric layers so that the top dielectric layer has the shape of the periodic pattern, said top dielectric layer having a top surface and a thickness greater than the thickness of any of the plurality of dielectric layers; and a periodic grating formed through the top surface and into the top dielectric layer, said periodic grating having channels that extend along a second direction substantially orthogonal to the first direction where the periodic pattern is formed into the periodic grating so that the pattern crosses the channels.