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经营范围
发明名称
WAFER CARRIER SYSTEM
摘要
申请公布号
JPS6331133(A)
申请公布日期
1988.02.09
申请号
JP19860173821
申请日期
1986.07.25
申请人
NIKON CORP
发明人
SHIBATA HIROMASA
分类号
H01L21/677;B65G1/00;B65G37/00;B65G49/05;B65G49/07;H01L21/68
主分类号
H01L21/677
代理机构
代理人
主权项
地址
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