| 摘要 |
<p>PURPOSE:To improve the efficiency of the treatment of a wafer by mounting a shock absorber in a carrier means for the wafer or a wafer carrier and feeding the wafer or the wafer carrier in desired order by reversing the order of the wafer or the wafer carrier. CONSTITUTION:A shock absorber 75, which discriminates the kinds (such as size) of wafers or wafer carriers 44 being carried and fed and can reverse the order in the direction of carrying of the wafers or the wafer carriers 44 in response to the result of discrimination, is arranged in front of a wafer treater 80 in the direction of carrying of the wafers or the wafer carriers 44. The shock absorber is not operated when the wafers or the wafer carriers 44 being carried belong to specific kinds, and holds the wafers or the wafer carriers 44 and retreats them to the outside of a conveyor. Accordingly, even when a plural kind of wafers are mixed or being carried in out of order, each wafer can be fed efficiently to the treater.</p> |
