METHOD FOR STORING RADIATION SENSITIVE RESIN COMPOSITION

摘要

PURPOSE:To ensure superior storage stability for a long term by storing a radiation sensitive resin composition prepared by dissolving a diazonium salt and a water-soluble polymer in water at a temperature of their freezing point or below it. CONSTITUTION:The radiation sensitive resin composition prepared by dissolving the diazonium salt and the water-soluble polymer in water is stored at a temperature of their freezing point or below it. The surface of a resist layer formed on a base plate is usually coated with the composition thus stored and thawed before coating, thus permitting decomposition of the diazonium salt to be usually prevented even after storage for 100-400 days, and this composition to be used as the radiation sensitive resin composition for the contrast enhancing lithography.