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发明名称
WIRING STRUCTURE
摘要
申请公布号
JPS6329547(A)
申请公布日期
1988.02.08
申请号
JP19860171657
申请日期
1986.07.23
申请人
HITACHI TOBU SEMICONDUCTOR LTD;HITACHI LTD
发明人
NARA AKIRA
分类号
H01L21/3205;H01L23/52
主分类号
H01L21/3205
代理机构
代理人
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地址
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