MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE,申请号JP19860171565-传众专利搜索

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发明名称	MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号	JPS6329503(A)	申请公布日期	1988.02.08
申请号	JP19860171565	申请日期	1986.07.23
申请人	HITACHI LTD	发明人	TANIZAKI YASUNOBU
分类号	H01L21/285;H01L21/28	主分类号	H01L21/285
代理机构		代理人
主权项
地址

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