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经营范围
发明名称
PLASMA TREATMENT APPARATUS
摘要
申请公布号
JPS6329520(A)
申请公布日期
1988.02.08
申请号
JP19860171566
申请日期
1986.07.23
申请人
HITACHI LTD
发明人
IKEDA HIROSHI
分类号
H01L21/302;H01L21/3065;H01L21/31
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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