| 摘要 |
PROBLEM TO BE SOLVED: To provide an optical displacement meter with which it is possible to measure the displacement of a desired portion of a measurement object regardless of whether or not the positions of a plurality of portions of the measurement object change independently.SOLUTION: A master profile shape that servers as a reference for the profile shape of a workpiece W is displayed on a display unit 300. First and second correction frames are set to the master profile shape, and first and second measurement frames are set to the master profile shape so as to be correlated to the first and second correction frames. When measurement is taken of the workpiece W, first and second positional deviations in the profile shape from the master profile shape within the first and second correction frames are calculated on the basis of master profile data and profile data. The positions of the first and second measurement frames are corrected on the basis of the first and second positional deviations, and also a process for measuring displacement between the profile shapes within the corrected first and second measurement frames is executed.SELECTED DRAWING: Figure 1 |
