| 摘要 |
PURPOSE:To improve the sealing property of a bonded part by binding an accelerating member and an insulating member through a layer consisting of at least one kind among the group IVa elements of the periodic table to form the title accelerating tube. CONSTITUTION:For example, an annular insulating member 3 consisting of Al2O3 having 96% purity and an annular accelerating member 2 consisting of Ti are alternately laminated through alloy foil 5. In this case, a material consisting of 71% Ag - 27% Cu - 2% Ti is used for the alloy foil 5. The laminate thus obtained is then vertically compressed to weld the respective members to one another, subsequently heated under <=1X10<-4>Torr vacuum at about 880 deg.C for about 10min, and bonded to form the accelerating tube. The thickness of the alloy foil 5 is appropriately adjusted to about 10-50mum, and the maximum surface roughness Rmax of the bonded surface of the insulating member 3 is appropriately controlled to <=10mum. |
