| 摘要 |
PURPOSE:To prevent the damage of a crucible having a multilayered structure due to a shrinkage strain produced between a metal to be evaporated and the crucible during cooling by forming one or more layers so that they are hot bonded to other constituent layers of the crucible. CONSTITUTION:A thermally decomposed boron nitride crucible consisting of weakly joined two or more layers is produced. External force is applied to the crucible to separate the layers from the weakly joined parts and surface treatment is carried out by ultrasonic cleaning with an org. solvent such as ethanol and drying. After the surface treatment, the layers are combined to obtain a multilayered crucible. When the resulting crucible is used to evaporate a metal, it withstands force applied by the difference in coefft. of thermal expansion between the crucible and the metal during cooling. In case where the inner layer is damaged, the crucible is not entirely damaged, so the service life is prolonged. |
