| 摘要 |
PURPOSE:To prevent the plasma damage and to efficiently carry out uniform plasma treatment by pulling out the plasma in the form of a sheet, and positioning a substrate close to and in parallel with the plasma. CONSTITUTION:A plasma producing chamber 2 communicates with a reactant treating chamber 3 through a plasma injection port 4 in the plasma reactor. The inside of the reactor is evacuated to a specified pressure from an evacuation port 10. A microwave is introduced into the plasma producing chamber 2 from a waveguide 6 through a quartz glass window part 5 to make a discharge gas supplied from a gas supply ring 7a into plasma. The generated plasma is throttled by a magnet 8 into a cylindrical form, transported, and injected into the reactant treating chamber 3 from the plasma injection port 4. The plasma is pulled out as a sheet-like plasma by a magnet 9. A real gas is supplied from a gas supply ring 7b toward the sheet-like plasma and activated. The substrate 1 is positioned close to and in parallel with the sheet-like plasma, and preferably rotated by the driving of a motor 15. As a result, the substrate 1 is uniformly and efficiently treated with plasma. |
