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经营范围
发明名称
PLASMA ETCHING DEVICE
摘要
申请公布号
JPS6328884(A)
申请公布日期
1988.02.06
申请号
JP19860174133
申请日期
1986.07.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
YAMADA MITSURU
分类号
C23F4/00
主分类号
C23F4/00
代理机构
代理人
主权项
地址
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