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经营范围
发明名称
WORKING METHOD FOR SILICON WAFER
摘要
申请公布号
JPS6328041(A)
申请公布日期
1988.02.05
申请号
JP19860172618
申请日期
1986.07.22
申请人
MITSUBISHI METAL CORP;JAPAN SILICON CO LTD
发明人
SAKAI SHINSUKE;HORIOKA YUUKICHI;SAITO YUICHI
分类号
H01L21/322
主分类号
H01L21/322
代理机构
代理人
主权项
地址
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