| 摘要 |
PURPOSE:To avoid generation of an arc discharge at both ends of main electrodes caused by insufficient exchange of laser gas by a method wherein the flow speed of the laser gas which is circulated by a gas transmission means is controlled so as to be approximately uniform along the longitudinal direction of a pair of the main electrodes by a control means. CONSTITUTION:Fins 9 which are inclined outward at both the ends of a discharge part 1 constitute a control means which controls the flow and flow speed of laser gas so as to make them uniform over the whole length of the discharge part 1. By inclining the fins 9 at both ends of the longitudinal direction of the discharge part 1 outward, the flow and the flow speed of the laser gas flowing between an anode 2 and a cathode 3 are made to be approximately uniform over the whole length of the longitudinal direction of the discharge part 1. In other words, sufficient exchange of the laser gas can be realized at both ends of the longitudinal direction of the discharge part 1 so that an arc discharge at both ends can be avoided and a laser beam can be emitted in a steady state. |
