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经营范围
发明名称
VAPOR GROWTH APPARATUS
摘要
申请公布号
JPS6328031(A)
申请公布日期
1988.02.05
申请号
JP19860171225
申请日期
1986.07.21
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HASE NOBUYASU;OSHIMA MASAAKI;TAKEUCHI YOSHINORI;HIRAYAMA NORIYUKI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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