| 摘要 |
PURPOSE:To produce a tight aluminum oxide film, by cutting an aluminum group material while it is cooled by an inert gas and oxygen within a dehydrated vessel and forming a plasma on the cut surface. CONSTITUTION:An aluminum group workpiece W is set in a vessel 1 which is dehydrated by a vacuum pump 6 and cut by a cutting tool 4. At the cutting process, the portion to be cut is cooled by an inert gas and oxygen to be supplied from a gas cylinder 9 through a nozzle 8. On the cut surface 18, a plasma 17 is formed by means of a charging electrode 11, and an aluminum oxide film is formed by the plasma. Since such things as cutting oil and impure gas are not present in the vessel, a tight aluminum oxide film can be produced. |
