发明名称 Electroplating apparatus for plate-like workpieces, in particular printed circuit boards
摘要 The plate-like workpieces which are to be treated and which are, in particular, printed circuit boards (Lp) are conveyed on a horizontal conveyance track through the treatment cell (Bz) which contains electrolyte solution. Situated above the conveyance track is a soluble upper anode (Ao) which comprises soluble anode material (Am) situated on a sieve-like or grid-like carrier (Tr). Situated underneath the conveyance track is an insoluble lower anode (Au) which preferably has a sieve-like or grid-like structure and is expediently composed of platinum-plated titanium. As a result of the special combination of soluble upper anode (Ao) and insoluble lower anode (Au), the workpieces always pass through the anodes (Ao, Au) at an equal distance. This results in an extremely low variation in the layer thickness and a very good layer thickness distribution in the deposition of metal by electroplating. <IMAGE>
申请公布号 DE3625475(A1) 申请公布日期 1988.02.04
申请号 DE19863625475 申请日期 1986.07.28
申请人 SIEMENS AG 发明人 HOSTEN,DANIEL
分类号 C25D17/00;H05K3/24;(IPC1-7):C25D17/00;C25D17/12;C25D17/06;C25D19/00;C25D21/10;C25D7/00;H05K3/00 主分类号 C25D17/00
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