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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPS6325953(A)
申请公布日期
1988.02.03
申请号
JP19860169106
申请日期
1986.07.17
申请人
NEC CORP
发明人
SUGIKI TADASHI
分类号
H01L21/288;H01L21/60
主分类号
H01L21/288
代理机构
代理人
主权项
地址
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