| 发明名称 |
METAL FILM RESISTOR AND COMPOSITION REGULATED MULTILAYER THIN FILM SYSTEM |
| 摘要 |
<p>A compositionally modulated multilayer thin film material system for use as a resistive material in metal film resistors wherein at least two different metallic compositions having good resistive properties are deposited alternately in thin film layers on a substrate, the resulting film having improved TCR & TCR Slope characteristics.</p> |
| 申请公布号 |
JPS6325901(A) |
申请公布日期 |
1988.02.03 |
| 申请号 |
JP19870130037 |
申请日期 |
1987.05.28 |
| 申请人 |
U S PHILIPS CORP |
发明人 |
ARUGENISU RAMON PURAITO;DABITSUDO PEITON KURAAKU |
| 分类号 |
H01C7/00;H01C7/06;H01C7/18;H01C17/08;H01C17/232 |
主分类号 |
H01C7/00 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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