| 摘要 |
<p>PURPOSE:To obtain a conveying apparatus, which can reduce the area of a floor occupied by the conveying means of wafer carriers, as much as possible, by constituting the conveying means by supporting members for a plurality of wafer carriers, which are arranged in series so that the carriers can be moved in the vertical direction, and a driving means, which drives the supporting means in the vertical direction. CONSTITUTION:A plurality of wafers 82 are accommodated in each of at least two wafer carriers 80. The carriers are conveyed to a specified position by a wafer conveying means. The wafers 82, are taken out of the wafer carrier 80, which is conveyed to the specified position one by one and conveyed to a wafer processing device by a wafer conveying means. Said wafer conveying means in a conveying apparatus for the wafers and the wafer carriers include the following parts. A plurality of wafer carrier supporting parts 22 are arranged in series in the moving direction so that the members can be moved in the vertical direction between the upper position and the lower position. Driving means 10-20 drive the wafer carrier supporing members 22 in the vertical direction.</p> |
