VACUUM DEPOSITION PROCESS,申请号GB19870029548-传众专利搜索

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发明名称	VACUUM DEPOSITION PROCESS
摘要
申请公布号	GB8729548(D0)	申请公布日期	1988.02.03
申请号	GB19870029548	申请日期	1987.12.18
申请人	GENERAL ELECTRIC CO PLC	发明人
分类号	C23C16/24;C23C16/40;C23C16/44;H01L21/316	主分类号	C23C16/24
代理机构		代理人
主权项
地址

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