| 摘要 |
<p>PURPOSE:To replace the material for a vacuum chamber by airtightly maintaining the chamber by a method wherein a replacement chamber, which is closely in contact with the circumference of the material arrangement range of a material supporting stand, is inserted into the entrance and exit aperture of the replacement chamber provided on the outer wall of the vacuum chamber in such a manner that the material can be taken in and out or moved, and an opening or closing cover to be used for taking in and out of the material is provided on the outer edge of the replacement chamber. CONSTITUTION:The inlet and outlet opening 3 is provided on the ceiling part of the outer wall of a vacuum chamber 1 opposing to the material supporting stand 2 provided in the vacuum chamber 1, and a replacement chamber 4 is inserted into the aperture 3 in such a manner that it can be taken in and out or moved. The replacement chamber 4 is formed in such a manner that both ends of the chamber are opened, a flange 4a is provided on the outer edge, and it has a cylindrical shape, and an opening and closing cover 5 is attached to an opening 4b on the outer edge using a hinge 6 in such a minner that it can be opened, closed or pivotally moved. On the replacement chamber 4, the circumferential part of the opening 4c on the inner edge is closely contacted to the circumference in the range of arrangement of material of the supporting stand 2 in upward-facing position when the replacement chamber 4 is in the entering position, and the packing 7 to be used for airtight sealing is attached to the circumferential part of the opening 4c. Through these procedures, the material can be replaced by airtightly maintaining the vacuum chamber.</p> |
