| 摘要 |
<p>PURPOSE:To efficiently perform the trimming operation of a high density circuit ranging over a plurality of cards and to eliminate manual operations such as the replacement of a probe. CONSTITUTION:A laser beam is scanned by the laser beam optical system 6 of a resistor trimming device, and a substrate is positioned by an X-Y table 14. A means A for changing probe cards is arranged between said optical system 6 and the table 14, and the probe cards 10a-10c which are positioned on a probe pin 23 are changed over by an NC-controlled motor 11. Then, the probe cards 10a-10c are changed over to the prescribed position by the means A using the rail 12 and the pin 23 connected to the motor 11, the conductor connected to a measuring instrument through the pin 23 is trimmed, and the efficiency of said trimming can be improved.</p> |
