| 摘要 |
PURPOSE:To prevent the dispersion of output current from occuring by a method wherein a protrusion in the same width as that of interconnection parts is provided on the positions symmetrical to those of individual electrodes with interconnection parts. CONSTITUTION:A transparent conductive film is formed on a glass plate 1 to be patterned forming individual electrodes 31-35. Interconnection parts 30 connecting to switching ICs are alternately led from the electrodes 31-35 upward and downward. Furthermore, a prodtrusion 6 in the same width as that of the parts 30 of electrodes 31-35 is formed of the transparent electrode in the direction reverse to the parts 30. Insulating films 51, 52 with openings are formed on the electrodes 31-35. An alpha-Si layer is formed of three layers of p,i, n in this order from the substrate 1 side. Finally, a common electrode 4 is formed. In such a constitution, the contact space of transparent conductive film with the layer 2 as well as the power generating space can be stabilized without dispersion of output due to the protrusion 6 added to the electrodes 31-35. |
