| 摘要 |
PURPOSE:To form an anisotropic rare earth magnet material having structural and magnetic anisotropy on a substrate by sputtering a target made of the specific compsn. consisting of metals such as rare earth metal elements and Co and O in an Ar atmosphere. CONSTITUTION:The target made of the component compsn. consisting of (R1-aOa)bM1-b (where R; rare earth metallic element of >=1 kinds among lanthanide La including Y, Ce, Pr, Nd, Pm, Sm, Eu, Gd, Tb, Dy, Ho, Er, Tm, Yb, Lu, and Hf, M; Co or combination of Co and >=1 kinds among Fe, Cu, Zr, Ti, Al, and B, a<=0.05, b=0.1-0.5) is disposed in the Ar atmosphere. AC or DC electric field is impressed between the above-mentioned target and the substrate consisting of glass, etc., to execute sputtering. The material having the structural and magnetic anisotropy is thus formed on the above-mentioned substrate. |
