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发明名称
摘要
申请公布号	JPS6315073(U)	申请公布日期	1988.02.01
申请号	JP19860106868U	申请日期	1986.07.11
申请人		发明人
分类号	H01L31/042;B08B3/02;H01L31/04;(IPC1-7):H01L31/04	主分类号	H01L31/042
代理机构		代理人
主权项
地址

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