METHOD AND APPARATUS FOR TRANSFERRING WAFER CASSETTE FROM FIRST LEVEL TREATMENT APPARATUS TO SECOND LEVEL TREATMENT APPARATUS

摘要

A wafer cassette transfer mechanism (18) is disclosed which transfers a wafer cassette (19) from a transfer arm (10) to an elevator (12). The elevator (12) moves vertically, up or down, so as to move the wafer cassette to a second transfer arm. The second transfer arm can then move the wafer cassette to after processing equipment.