PROJECTION EXPOSURE DEVICE,申请号JP19870088716-传众专利搜索

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发明名称	PROJECTION EXPOSURE DEVICE
摘要
申请公布号	JPS6323317(A)	申请公布日期	1988.01.30
申请号	JP19870088716	申请日期	1987.04.13
申请人	CANON INC	发明人	MATSUKI TOSHIO
分类号	G03B27/32;G03F7/20;H01L21/027;H01L21/30	主分类号	G03B27/32
代理机构		代理人
主权项
地址

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